Discharge exciting pulse laser device

Details Discharge exciting pulse laser device Discharge exciting pulse laser device

H - Electricity

01

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H01S 3/097 (2006.01) H01S 3/038 (2006.01) H01S 3/0971 (2006.01) H01S 3/102 (2006.01)

Patent

CA 2017056

A discharge exciting pulse laser device such as an exima laser device. The laser device is capable of accelerating the timing of rise of the voltage between an auxiliary electrode and one of main electrodes without decreasing a discharge start voltage between the main electrodes, so that the laser output power is increased and the laser oscillation efficiency is improved.

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