Discharge lamp sources apparatus and methods

Details Discharge lamp sources apparatus and methods Discharge lamp sources apparatus and methods

H - Electricity

01

J

H01J 35/20 (2006.01) G01J 3/10 (2006.01) G03F 7/20 (2006.01) H01J 61/12 (2006.01) H01J 61/28 (2006.01) H01J 61/30 (2006.01) H05G 2/00 (2006.01)

Patent

CA 2315740

A capillary discharge extreme ultraviolet lamp source apparatus and method for extreme ultraviolet microlithography. The capillary source includes a lamp body (306); a bore having electrodes (300), insulators (302) and a discharge plasma region (304).

L'invention concerne un appareil présentant une source de décharge dans un capillaire pour lampe à ultraviolet extrême et un procédé destiné à la microlithographie à ultraviolet extrême. La source de décharge dans un capillaire comprend un corps de lampe (306), un orifice présentant des électrodes (300), des isolants (302) et une zone de plasma de décharge (304).

Affiliated with

Also associated with

Rating

Discharge lamp sources apparatus and methods does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Discharge lamp sources apparatus and methods, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Discharge lamp sources apparatus and methods will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1385151