H - Electricity – 01 – S
Patent
H - Electricity
01
S
H01S 3/0977 (2006.01) H01S 3/0971 (2006.01)
Patent
CA 2066804
A discharge-pumped gas laser, typically a dis- charge-pumped excimer laser, includes a main discharge cir- cuit for producing an electric discharge in a laser gas to excite the laser gas for laser emission. The main dis- charge circuit comprises a first electric circuit having a thyratron, a charging circuit including a charging capaci- tor for storing an electric energy to operate the thyra- tron, and a discharging circuit including a pair of main discharge electrodes and a peaking capacitor for storing an electric energy to cause a main discharge in the laser gas between the main discharge electrodes. The laser gas is preionized by preionizers having a plurality of preionizing electrodes which produce an electric discharge to preionize the laser gas. The preionizing electrodes are connected in a second circuit which has a plurality of distributing ca- pacitors for storing an electric energy to enable the preionizing electrodes to preionize the laser gas and sup- ply substantially uniform electric currents to the preion- izing electrodes. The distributing capacitors have sub- stantially the same capacitances. The first and second electric circuits are substantially independent of each other.
Furuya Nobuaki
Horiuchi Naoya
Miyata Takeo
Ono Takuhiro
Takahata Kenichi
Furuya Nobuaki
Horiuchi Naoya
Matsushita Electric Industrial Co. Ltd.
Miyata Takeo
Ono Takuhiro
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