Discharge vessel with excimer fill, and associated discharge...

Details Discharge vessel with excimer fill, and associated discharge... Discharge vessel with excimer fill, and associated discharge...

H - Electricity

01

J

H01J 61/12 (2006.01) B05D 1/30 (2006.01) B05D 3/02 (2006.01) C03C 17/10 (2006.01) C03C 17/25 (2006.01) H01J 9/00 (2006.01) H01J 9/24 (2006.01) H01J 61/35 (2006.01)

Patent

CA 2396018

A discharge vessel with an excimer fill comprises a cap, electrodes and a fill having at least one noble gas and a halogen, which, when the lamp is operating, together form an excimer, the discharge vessel being manufactured from quartz glass. The inner wall of the discharge vessel is completely covered with a passivation layer of a metal oxide of the metals Al, Hf, Y or Sc or the mixed oxides thereof, the layer having an amorphous structure and its layer thickness being 20 to 200 nm.

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