Discretely controlled micromirror with multi-level positions

Details Discretely controlled micromirror with multi-level positions Discretely controlled micromirror with multi-level positions

G - Physics

02

B

G02B 26/00 (2006.01)

Patent

CA 2571329

This invention provides the two types of Discretely Controlled Micromirror (DCM), which can overcome disadvantages of the conventional electrostatic micromirrors. The first type micromirror is a Variable Support Discretely Controlled Micromirror (VSDCM), which has a larger displacement range than the conventional electrostatic micromirror. The displacement accuracy of the VSDCM is better than that of the conventional electrostatic micromirror and the low driving voltage is compatible with IC components. The second type of DCM, the Segmented Electrode Discretely Controlled Micromirror (SEDCM) has same disadvantages with the conventional electrostatic micromirror. But the SEDCM is compatible with known microelectronics technologies.

Cette invention concerne les deux types de micromiroirs à contrôle discret (DCM, Discretely Controlled Micromirror) qui peuvent palier les inconvénients des micromiroirs électrostatiques conventionnels. Le premier type de micromiroirs est un micromiroir à contrôle discret à support variable (VSDCM, Variable Support Discretely Controlled Micromirror) dont la course est supérieure à celle du micromiroir électrostatique conventionnel. La précision de la course du VSDCM est meilleure que celle du micromiroir électrostatique conventionnel et la basse tension de commande est compatible avec l~utilisation de circuits intégrés. Le deuxième type de DCM, le micromiroir à contrôle discret à électrode segmentée (SEDCM, Segmented Electrode Discretely Controlled Micromirror), présente les mêmes inconvénients que le micromiroir électrostatique conventionnel mais est compatible avec des technologies connues de micro-électronique.

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