B - Operations – Transporting – 65 – G
Patent
B - Operations, Transporting
65
G
B65G 49/07 (2006.01) G03F 7/20 (2006.01) H01L 21/677 (2006.01) H01L 21/68 (2006.01)
Patent
CA 2094437
The dispatching apparatus with a gas supply distribution system basically comprises an automatic handler 301 and a vertical stocker. The vertical stocker comprises a frame formed by an assembly of tubes sup porting a plurality of support stations or bins each provided with gas injector means connected on the one hand to the gas injection valve means of the container and on the other hand to a compressed ultra pure neutral gas supply installation. As a result, during the processing idle times, an adequate overpressure of said neutral gas is maintained in the interior space of the container enclosing the workpiece, e.g. a silicon wafer. The automatic handler basically comprises a handling robot having an extending arm provided with gripping means adapted to the container design. The handling robot is affixed on an elevator for vertical movement and is able to rotate about it. The automatic handler is adapted to transfer of containers between the vertical stocker and conventional conveyors or between the conveyors themselves.
Répartiteur relié à un système de distribution de gaz, constitué essentiellement d'un manipulateur automatique (301) et d'une unité de rangement vertical. Cette dernière comprend un cadre formé par l'assemblage de tubes, qui supportent une série de postes d'appui ou de bacs, chacun muni d'un dispositif d'injection de gaz relié d'une part à une soupape d'injection de gaz du contenant et, d'autre part, à une installation d'alimentation en gaz neutre comprimé ultrapure. Cette configuration permet, pendant les temps de traitement perdus, de maintenir une surpression adéquate de gaz neutre dans l'espace interne du contenant renfermant la pièce de travail, telle une tranche de silicium. Le manipulateur automatique comporte principalement un robot manipulateur muni d'un bras extensible doté d'un dispositif de préhension adapté à la forme du contenant. Le robot manipulateur est fixé à un ascenseur qui lui permet de se déplacer verticalement et autour duquel il peut tourner. Le manipulateur automatique sert à transférer les contenants entre l'unité de rangement vertical et des transporteurs classiques ou entre plusieurs transporteurs.
Garric Georges
Lafond Andre
Barrett B.p.
International Business Machines Corporation
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