B - Operations – Transporting – 41 – F
Patent
B - Operations, Transporting
41
F
101/50
B41F 1/18 (2006.01) G03F 7/20 (2006.01) H01L 21/67 (2006.01)
Patent
CA 1217088
PHN l0.503 -9- 4.6.1983 ABSTRACT : Displacement device, particularly for the photo-litho- graphic treatment of a substrate. A displacement device, which is particularly suitable for use in an apparatus for the photolithographic treatment of a substrate, is provided with a holder which is placed on a carriage mechanism which is acted upon by driving members for imparting translational movements and a rotary movement to the holder. The carriage is consti- tuted by a lower and an upper carriage part, which carri- age parts each have a flat surface, these surfaces facing each other. Three linear driving members act upon the carriage, which driving members each have a housing and a driving element which projects at both ends from the housing and which is axially movable with respect to the housing. The housing of the first driving member is con- nected to the upper carriage part, while the driving ele- ments of the second and the third driving members are coupled to the lower carriage part and the driving elements of the first driving member are connected to the housing of the second and the third driving member, respectively, the driving members being arranged in the shape of an H.
440621
Bouwer Adrianus G.
Wittekoek Stefan
Koninklijke Philips Electronics N.v.
Van Steinburg C.e.
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