Dual face shower head electrode for a magnetron plasma...

Details Dual face shower head electrode for a magnetron plasma... Dual face shower head electrode for a magnetron plasma...

H - Electricity

01

J

H01J 37/32 (2006.01) C23C 16/30 (2006.01) C23C 16/50 (2006.01) C23C 16/509 (2006.01) H01J 37/34 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2303897

An electrode (10) is provided which can improve the efficiency and quality of plasma-generated coatings in a plasma enhanced chemical vapor deposition coating device. The electrode comprises dual shower head faces (11, 11') containing in the preferred mode a plurality of magnets (13) which are aligned so that the poles of the magnets face in the same direction to thus generate two magnetron faces for each set of magnets.

L'invention concerne une électrode (10) qui permet d'améliorer l'efficacité et la qualité des revêtements par plasma dans un dispositif de revêtement par dépôt chimique en phase vapeur amélioré. Cette électrode est dotée de doubles faces en pomme de douche (11, 11') qui, selon le mode de réalisation préféré, comportent une pluralité d'aimants (13) alignés de sorte que les pôles des aimants soient tournés dans la même direction, donnant ainsi deux faces de magnétron pour chaque série d'aimants.

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