Dual-tone imaging using novolac photoresists and carbodiimides

Details Dual-tone imaging using novolac photoresists and carbodiimides Dual-tone imaging using novolac photoresists and carbodiimides

G - Physics

03

F

96/155

G03F 7/004 (2006.01) G03F 7/022 (2006.01) G03F 7/038 (2006.01) G03G 5/12 (2006.01)

Patent

CA 2037385

- 27 - DUAL TONE IMAGING USING NOVOLAC PHOTORESISTS AND CARBODIIMIDES ABSTRACT OF THE DISCLOSURE The resolution and stability of liquid, dual- tone photoresist formulations containing novolac resins and photoactive compounds are enhanced by the incorporation therein of certain carbodiimide resolution enhancers.

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