Dust-proof film

Details Dust-proof film Dust-proof film

H - Electricity

01

L

95/94.4

H01L 21/00 (2006.01) G03F 1/14 (2006.01)

Patent

CA 1319043

DUST-PROOF FILM ABSTRACT OF THE DISCLOSURE A dust-proof film comprising a pellicle frame and a pellicle film spread on one side face of the frame, which is attached to a photomask, a reticle or the like to prevent a foreign substance from adhering to a pattern, wherein a paint is coated on the inner side face of the pellicle frame to form a coating layer, whereby a generation of dust from a surface of the pellicle frame is prevented.

573960

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