Edge illuminated impurity band conduction detector arrays

H - Electricity – 01 – L

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H01L 31/10 (2006.01) H01L 25/04 (2006.01) H01L 27/146 (2006.01)

Patent

CA 1283968

ABSTRACT An edge illuminated optical detector array includes a series of two or more detectors which operate under an applied electric field. Each detector includes an extrinsic semiconducting active layer with a first conductivity type impurity concentration high enough to create an impurity energy band, and an intrinsic semiconducting blocking layer in which substantially no charge transport occurs by an impurity conduction mechanism. The detectors are positioned relative to one another such that optical energy incident on the array and directed substantially orthogonal to the applied electric field impinges on the first detector in the series and the portion of the optical energy which is transmitted by each detector is directed to the succeeding detector in the series. In this manner, the spectral content of the optical energy impinging on each detector is modified by the spectral transmission characteristics of the preceding detectors. In a solid state photomultiplier detector embodiment, each detector also includes an extrinsic semiconducting buffered layer having a first conductivity type impurity concentration which is high enough to create an impurity energy band and a second conductivity type impurity concentration which is high enough that first conductivity type carriers injected into the buffered layer recombine with ionized first conductivity type impurities. Each active layer also includes a second conductivity type impurity concentration which is low enough that first conductivity type carriers photogenerated in the active layer can drift through the active layer without recombining with ionized first conductivity type impurities.

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