Elastic bladder method of fabricating an integrated circuit...

B - Operations – Transporting – 23 – B

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B23B 31/20 (2006.01) H01L 21/48 (2006.01) H01L 23/498 (2006.01)

Patent

CA 1261976

ABSTRACT OF THE DISCLOSURE ELASTIC BLADDER METHOD OF FABRICATING AN INTEGRATED CIRCUIT PACKAGE HAVING BONDING PADS IN A STEPPED CAVITY An integrated circuit package is fabricated by assembling a stack which is comprised of a plurality of thin flat epoxy-glass layers, adhesive layers between the epoxy-glass layers, and a staircase-shaped cavity. This cavity extends from an outer epoxy-glass layer to an internal epoxy-glass layer, goes parallel along a portion of the flat surface. of the internal epoxy-glass layer, and then penetrates through it. Conductors lie on the internal epoxy-glass layer including bonding pads on the flat sur- face portion. After the stack is assembled, the outer epoxy-glass layer and the cavity are covered with an elastic bladder. Subsequently, the stack is laminated by forcing a fluid into the bladder at a temperature and pressure which causes the bladder's membrane to stretch and push against all the surfaces of the cavity. This dams the adhesive from flowing onto the bonding pads.

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