Elastic member for micromechanical device

Details Elastic member for micromechanical device Elastic member for micromechanical device

H - Electricity

01

L

H01L 21/64 (2006.01) C23C 14/34 (2006.01) G02B 26/08 (2006.01) G02B 27/00 (2006.01)

Patent

CA 2184529

All improved elastic member (24) for micromechanical devices (12). The micromechanical device (12) includes a stationary member (28) and a moving member (26) which are connected together by a elastic member (24). Because of repeated and frequent movement of the moving member (26), the elastic member (24) can become permanently flexed or deformed, resulting in poor operation of the device. Nitrided aluminum and non-aluminum alloys can be used to form a metal from which the elastic member (24) is formed, either as polycrystalline films or as amorphous films. There alloys have isotropic elastic properties, high tensile strength and form smooth films when deposited.

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