Electric insulation thin layer containing carbon

Details Electric insulation thin layer containing carbon Electric insulation thin layer containing carbon

H - Electricity

01

B

345/23

H01B 3/00 (2006.01) H01B 3/12 (2006.01) H01L 31/0224 (2006.01) H01L 31/20 (2006.01)

Patent

CA 1268241

ABSTRACT OF THE DISCLOSURE An electric insulation thin layer comprising a non-monocrystalline substance, being deposited on a substrate by means of a plasma CVD method or a spatter method, and having a carbon content of not less than 10 % by atom. The electric insulation layer is thinner and has an excellent heat resistance and a high dielectric breakdown voltage.

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