Electrically conductive feedthrough connection and methods...

Details Electrically conductive feedthrough connection and methods... Electrically conductive feedthrough connection and methods...

G - Physics

01

L

73/3, 73/70

G01L 7/02 (2006.01) G01L 9/00 (2006.01) H01J 5/32 (2006.01) H01J 9/32 (2006.01) H05K 3/40 (2006.01)

Patent

CA 2028113

A mechanically heavily loadable and high-vacuum-tight feedthrough connection through a hole (2) of a high-temperature-resistant and vacuum-proof insulating part (1), particularly of ceramic, glass, or a single crystal, is disclosed which can be produced in a single high-temperature step and is thus inexpensive. It is designed as a terminal lead (4) covered with active solder and soldered into the hole, the terminal lead having a coefficient of thermal expansion less than that of the insulating part (1). The feedthrough connection is preferably used in a capacitive pressure sensor (10) having a diaphragm (11) and a substrate (12) which nave-spaced-apart, flat inner surfaces which are provided with at least one conductive layer (14, 15) for forming at least one capacitor and are electrically connected to the respective rear side via the feed-through connection.

Raccord de traversée à forte résistance mécanique et haute résistance au vide à poser dans le trou (2) d'une pièce isolante (1) à haute résistance thermique et étanche au vide, fait de céramique, de verre ou d'un cristal simple, et qui peut être produit en une seul étape à haute température, ce qui le rend peu coûteux. Il est conçu comme borne de sortie (4) couverte de soudure active et soudée dans le trou, la borne de sortie ayant un coefficient d'expansion thermique inférieur à celui de la pièce isolante (1). Le raccord de traversée est utilisé de préférence dans un capteur capacitif de pression (10) doté d'une membrane (11) et d'un support (12) ayant des surfaces intérieures planes, espacées l'une de l'autre, qui comportent au moins une couche conductrice (14, 15) pour former au moins un condensateur et qui sont raccordées électriquement au côté arrière respectif par le raccord de traversée.

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