Electro-absorption modulator and method for manufacturing of...

G - Physics – 02 – F

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G02F 1/025 (2006.01) G02F 1/015 (2006.01) G02F 1/017 (2006.01)

Patent

CA 2346654

Electro-absorption modulator (EAM), of the kind that includes a waveguide, for modulation of light, comprising a waveguide core, a waveguide cladding (42, 43, 52, 53), and an electrode (45, 55), the modulator being arranged to modulate light launched into the modulator as a response to a voltage being applied on the electrode. According to the invention, the width and/or the thickness of the waveguide core (41, 51) are/is varying along the length of the modulator. The width/thickness is smaller in the portion of the modulator where the light is intended to be input, for the purpose of reducing the absorption of the modulator there. A method in manufacturing of the modulator may utilize a tapered photolithography mask (46).

La présente invention concerne un modulateur électro-absorbant (EAM), du type à guide d'onde, servant à moduler la lumière, comprenant un coeur de guide d'onde, une gaine de guide d'onde (42, 43, 52, 53), et une électrode (45, 55); ce modulateur étant conçu pour moduler la lumière reçue en réponse à une tension appliquée sur l'électrode. Selon cette invention, la largeur et/ou l'épaisseur du coeur du guide d'onde (41, 51) varie(nt) le long du modulateur. Cette largeur/épaisseur est toutefois inférieure dans la partie du modulateur par laquelle doit pénétrer la lumière, de façon à y réduire l'absorption du modulateur. En outre, on peut utiliser dans le procédé de fabrication de ce modulateur un masque photolithographique conique (46).

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