H - Electricity – 02 – K
Patent
H - Electricity
02
K
310/36
H02K 7/14 (2006.01) G03F 7/20 (2006.01) G05D 3/12 (2006.01)
Patent
CA 1217224
Abstract of Disclosure This invention is directed to electro- magnetic alignment apparatus, which is particularly adapted, among many other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination three or more spaced magnets, three or more coil assemblies mounted to pass through the magnetic fields of the magnets respectively, means for controlling the flow of current through the coil assemblies respectively, said coil assemblies being joined together to form a structure movable with respect to the magnets and adapted to carry an object thereon, the coil assemblies being wound with respect to each other so that by controlling the supply of current to the coils the structure can be moved selectively in three degrees of freedom.
454032
Galburt Daniel
Trost David
Osler Hoskin & Harcourt Llp
Perkin-Elmer Corporation The
LandOfFree
Electro-magnetic alignment apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electro-magnetic alignment apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electro-magnetic alignment apparatus will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1241112