Electrocapasitive type force measuring apparatus

Details Electrocapasitive type force measuring apparatus Electrocapasitive type force measuring apparatus

G - Physics

01

L

G01L 1/14 (2006.01) G01B 7/16 (2006.01) G01D 5/24 (2006.01) G01N 33/543 (2006.01) G01R 27/04 (2006.01)

Patent

CA 2331699

A sensor unit 11 is formed by a single integral body obtained by coupling a resiliently deforming portion 12 with a base portion 13 without interposing a soft material therebetween, and a force applied to a probe 14 secured to a front end of the resiliently deforming portion 12 is measured as a change in capacitance of a capacitor constituted by electrodes secured to opposing surfaces of the resiliently deforming portion and base portion. These electrodes are connected to a resonance circuit of a high frequency oscillation circuit 22, and in order to measure a change in a resonance frequency which is varied in accordance with the applied force, an output signal from the high frequency oscillation circuit is counted by a digital frequency counter 23 for a predetermined time period. It is possible to provide the electrocapacitive type force measuring apparatus which can measure a very small force with an extremely high precision without being affected by temperature variation, humidity variation and secular variation.

Selon cette invention, une unité de capteur (11) comprend une partie souple (12) et une partie de base (13) intégrales qui comprennent des électrodes opposées faites sur les côtés de manière à former un condensateur dont le changement de capacitance est utilisé pour mesurer la force agissant sur un capteur (14) attaché à l'extrémité de la partie élastique. Ces électrodes sont connectées à un circuit de résonance d'un oscillateur haute fréquence (22), et un compteur de fréquence numérique (23) mesure le signal à la sortie de l'oscillateur haute fréquence pendant un temps prédéterminé pour mesurer le changement survenu dans la fréquence en fonction de la force qui varie. Un appareil capacitif de mesure de force muni de cette structure manifeste une sensibilité très élevée pour mesurer des forces de faible intensité, indépendamment des changements de température ou d'humidité; en outre, sa sensibilité ne faiblit pas avec le temps.

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