C - Chemistry – Metallurgy – 23 – F
Patent
C - Chemistry, Metallurgy
23
F
C23F 4/00 (2006.01) B23K 1/008 (2006.01) B23K 1/20 (2006.01) B23K 35/26 (2006.01) B23K 35/38 (2006.01) C23G 5/00 (2006.01) H01J 37/32 (2006.01) H01L 21/311 (2006.01) H01L 21/00 (2006.01)
Patent
CA 2465195
An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.
Arslanian Gregory Khosrov
Dong Chun Christine
Mcdermott Wayne Thomas
Orbeck Gary A.
Patrick Richard E.
Air Products And Chemicals Inc.
Btu International Inc.
Mcfadden Fincham
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