Electrode sputtering process for exhaust gas oxygen sensor

Details Electrode sputtering process for exhaust gas oxygen sensor Electrode sputtering process for exhaust gas oxygen sensor

H - Electricity

01

M

204/96.13

H01M 8/12 (2006.01) C03C 17/09 (2006.01) C23C 14/18 (2006.01)

Patent

CA 1124679

C-3,106 Abstract of the Disclosure A method of sputtering platinum onto a vitrified zirconia thimble to form an exhaust electrode for an electrochemical-type exhaust gas oxygen sensor. The electrode is sputtered under an atmosphere consisting essentially of more than about 50% oxygen and/or nitrogen by volume. Sensors having low symmetrical transition times are produced.

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