Electrode structure for use in electronic device and method...

H - Electricity – 01 – L

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H01L 31/0224 (2006.01) H01L 31/032 (2006.01) H01L 31/0392 (2006.01)

Patent

CA 2635043

An electrode structure is provided for use in an electronic device. In certain example embodiments, an electrode structure includes a supporting glass substrate (e.g., soda-lime silica based float glass), a buffer layer (e.g., SixNy), and a conductive electrode (e.g., Mo) provided.in this order. The buffer layer is advantageous in that it prevents or reduces sodium (Na) migration from the glass substrate into semiconductor layer(s) of the electronic device.

La présente invention concerne une structure d'électrode à utiliser dans un dispositif électronique. Dans certains modes de réalisation, une structure d'électrode comprend un substrat de verre de soutien (par ex. un verre flotté à base de silicium de chaux de soude), une couche tampon (par ex. SixNy) et une électrode conductrice (par ex. Mo) prévus dans cet ordre. La couche tampon est avantageuse en ce qu'elle empêche ou réduit la migration du sodium (Na) depuis le substrat de verre vers la ou les couches semi-conductrice(s) du dispositif électronique.

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