Electroetching thin noble metal film

H - Electricity – 05 – K

Patent

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Details

356/7, 204/86.5

H05K 3/07 (2006.01) C25F 3/02 (2006.01) H01L 21/00 (2006.01) H01L 49/02 (2006.01)

Patent

CA 1026704

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