Electromechanical resonator

Details Electromechanical resonator Electromechanical resonator

C - Chemistry, Metallurgy

04

B

333/59

C04B 35/46 (2006.01) C04B 35/48 (2006.01) C04B 35/50 (2006.01) C04B 35/51 (2006.01) H01L 41/18 (2006.01) H03H 3/02 (2006.01)

Patent

CA 908861

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