Electrometer probe

Details Electrometer probe Electrometer probe

G - Physics

01

R

324/47, 324/74.2

G01R 5/28 (2006.01) G01N 27/60 (2006.01) G01R 29/12 (2006.01) G01R 29/24 (2006.01)

Patent

CA 1152565

ABSTRACT OF THE DISCLOSURE A detecting electrode is formed on a substrate, an amount of potential from a charged surface induced in the detecting electrode corresponding to a potential on the sur- face. A guard electrode formed on the same surface of the substrate as the detecting electrode surrounds the detecting electrode. Part of the guard electrode is formed on the back surface of the substrate. The detecting electrode is connected to a non-inverting input of an operational ampli- fier. The output of the operational amplifier is connected to the inverting input thereof and also to the guard elec- trode to produce unity gain and place the guard electrode at the same potential as the detecting electrode. The substrate is formed of a material such that the electrical resistance between the detecting electrode and the guard electrode is at least 10 ohms to reduce zero drift to a negligible value.

345811

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