Electron beam array alignment means

Details Electron beam array alignment means Electron beam array alignment means

G - Physics

21

K

316/15

G21K 1/08 (2006.01) H01J 9/18 (2006.01) H01J 37/10 (2006.01) H01J 37/30 (2006.01)

Patent

CA 1184239

ABSTRACT OF THE DISCLOSURE An electron beam lens and deflector array mounting and alignment arrangement are disclosed. The array is a structure composed of several parallel plates which are held in parallel and axial alignment. The mounting arrangement comprises four slots, one at the end of the four corners of an imaginary rectangle, formed in each facing plate surface. Four cylindrical spacer rods are sandwiched between the plates, each seated in two facing slots.

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