Electron beam array for surface treatment

Details Electron beam array for surface treatment Electron beam array for surface treatment

H - Electricity

01

J

H01J 33/04 (2006.01) H01J 5/18 (2006.01) H01J 29/00 (2006.01) H01J 31/00 (2006.01)

Patent

CA 2398870

An array of electron beam tubes (152, 156. 158) is mounted on a conduc- tive place (91, 109, 123) for projecting stripe-like electron beam (163, 164, 165) through air onto a substrate (101) beneath the plate. The tubes each have a narrow beam window (51) formed by a very thin low-Z film layer (73), supported by silicon (71) and sealing the tube against ambi- ent pressure. Such windows produce low beam attenuation and allow low extrac- tion voltages to be used, thereby reducing beam energy which would otherwise be lost by penetration through a surface to be treated. The stripe-like output electron beam segments (113, 115) may be formed into a linear beam track so that the en- tire widthwise extent of a surface, such as a sheet or web (121), may be treated by electron beam irradiation or the beam segments may be formed into any desired composite beam pattern. In another em- bodiment the stripe-like output beam seg- ments may be arranged in an array to treat a circular circumferential surface, such as a cable.

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