Electron beam-excited ion beam source

Details Electron beam-excited ion beam source Electron beam-excited ion beam source

H - Electricity

01

J

358/25

H01J 37/08 (2006.01) H01J 27/02 (2006.01) H01J 27/20 (2006.01)

Patent

CA 1252581

ABSTRACT An electron beam-excited ion beam source having a plasma region, an accelerating cathode, an electron beam accelerating region, an accelerating anode, an ion producing region and a target cathode in this order, and further comprising means for applying a negative electric potential to the target cathode as against the accelerating cathode and an ion extracting electrode for extracting positive ions or negative ions produced in the ion producing region whereby a high current ion beam can be obtained in a low input power. - 15 -

510112

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