Electron beam sensitive polymer t-butyl methacrylate resist

Details Electron beam sensitive polymer t-butyl methacrylate resist Electron beam sensitive polymer t-butyl methacrylate resist

H - Electricity

01

L

96/222, 204/91.5

H01L 23/29 (2006.01) G03C 1/64 (2006.01) G03F 7/039 (2006.01) H01L 21/00 (2006.01)

Patent

CA 1010401

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