Electron beam test probe for integrated circuit testing

Details Electron beam test probe for integrated circuit testing Electron beam test probe for integrated circuit testing

G - Physics

01

R

356/24, 358/10.1

G01R 31/28 (2006.01) G01R 31/305 (2006.01) H01J 37/26 (2006.01) H01J 37/28 (2006.01)

Patent

CA 1271997

ABSTRACT A method for measuring the potential of a specimen which includes directing a beam of electrons at a point on the specimen. A magnetic lens collimates the secondary electrons resulting from the interaction of the electron beam of the specimen. Repetitive electrical test patterns are applied to the specimen and the electron beam is pulsed at a time relative to test pattern to produce measurements used to calculate the potential on the specimen.

504210

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