Electron cyclotron resonance ion source

Details Electron cyclotron resonance ion source Electron cyclotron resonance ion source

H - Electricity

01

J

313/28

H01J 27/18 (2006.01)

Patent

CA 1321229

ABSTRACT OF THE DISCLOSURE An electron cyclotron resonance ion source for an ion implanter. The source includes an ionization chamber surrounded along its length by an electromagnet. A number of extraction electrodes at an output end of the ionization chamber allow positively charged oxygen ions to pass through apertures in the electrodes. The uniformity of the axially aligned magnetic field in the ionization chamber is extended through the extraction electrode by a magnetically permeable electrode and through use of non- magnetically permeable material to mount others of said electrodes.

601416

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