Electron detector for use in a gaseous environment

Details Electron detector for use in a gaseous environment Electron detector for use in a gaseous environment

H - Electricity

01

J

358/10.1

H01J 37/28 (2006.01) H01J 37/244 (2006.01)

Patent

CA 2000571

IMPROVED GASEOUS DETECTOR DEVICE FOR AN ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE ABSTRACT OF THE DISCLOSURE This invention provides for an improved gaseous detector device for an environmental scanning electron micro- scope (ESEM). The geometrical configuration of the electrodes of the gaseous detector device set forth herein separate the various signals emanating from the specimen. Specifically, a first electron detector is formed integrally with the pressure limiting aperture which collects predominantly amplified low energy secondary electron signals. A generally annular electrode assembly is positioned slightly below the pressure limiting aperture and has an inner electron detector formed of a thin annular ring which collects predominantly amplified low energy secondary electron signals. The generally annular electrode assembly also includes an intermediate electron detector positioned radially outwardly of the inner electron detector and is formed of a first plurality of concentric arc segments. The intermediate electron detector collects predom- inantly amplified higher energy backscattered related signals. The generally annular electrode assembly further includes an outer electron detector positioned radially outwardly of the intermediate electron detector and is formed of a second plurality of concentric arc segments. The outer electron detector collects predominantly amplified low energy backscattered related signals. The first plurality of concen- tric arc segments are positioned generally opposite to the second plurality of concentric arc segments to obtain direc- tional topography contrast. An aperture carrier electron detector is positioned above the pressure limiting aperture within the vacuum column and is formed the thin annular ring which collects predominantly high-angle backscattered reflect- ed signals showing atomic number contrast. A control grid is positionable between the detectors and the specimen mount and biased at an electrical potential between the electrical potential applied to the electrodes and specimen mount so as to increase the acceleration of the signals emanating from the specimen.

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