Electron microscope

Details Electron microscope Electron microscope

H - Electricity

01

J

358/10

H01J 37/26 (2006.01) H01J 37/147 (2006.01) H01J 37/153 (2006.01) H01J 37/21 (2006.01)

Patent

CA 1061477

ABSTRACT: In an electron microscope having a compara- tively high resolution, a tilting motion about a point in an object to be imaged is imparted to the illuminat- ing electron beam in order to adjust the coherence of the exposure of an object. For the exposure aperture, the aperture given by the degree of deflection then takes the place of the very small aperture of the illu- minating electron beam. A preferred embodiment includes a correction device for the non-axial passage of the electron beam through a subsequent lens in the electron microscope. Operation with a conical exposure involving a present apex is also feasible. - 9 -

259926

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