Electron microscope (comprising an auxiliary lens)

Details Electron microscope (comprising an auxiliary lens) Electron microscope (comprising an auxiliary lens)

H - Electricity

01

J

358/10

H01J 37/26 (2006.01) H01J 37/04 (2006.01)

Patent

CA 1110781

ABSTRACT: A switchable auxiliary lens is arranged in the vicinity of the objective lens of an electron microscope to enable switching between TEM mode and STEM mode. The auxiliary lens is formed notably by an interruption in the magnetic circuit off one of the poles of the main lens, possibly in con- junction with an electromagnetic coil which can be excited in a commutatable manner. -15-

304092

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