Electron source and electron beam apparatus

Details Electron source and electron beam apparatus Electron source and electron beam apparatus

H - Electricity

01

J

H01J 29/48 (2006.01) G06F 3/147 (2006.01) H01J 1/316 (2006.01) H01J 29/84 (2006.01) H01J 31/12 (2006.01)

Patent

CA 2137873

An electron source or electron beam apparatus comprises an electron-emitting device and a shield member disposed above the electron-emitting device. The electron-emitting device generates an electric field component, when energized, that is parallel to a substrate surface on which the electron-emitting device is disposed, while the shield member allows electrons emitted from the electron-emitting device to pass therethrough, but blocks off charged particles flying toward the electron emitting device.

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