H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/768 (2006.01) H01L 21/66 (2006.01) H01L 23/48 (2006.01)
Patent
CA 2249062
A via hole having a bottom is formed in a substrate and then a conductor layer is formed at least over a sidewall of the via hole. Thereafter, the substrate is thinned by removing a portion of the substrate opposite to another portion of the substrate in which the via hole is formed such that the conductor layer is exposed.
Furukawa Hidetoshi
Ishida Hidetoshi
Noma Atsushi
Tanaka Tsuyoshi
Ueda Daisuke
Kirby Eades Gale Baker
Matsushita Electric Industrial Co. Ltd.
Matsushita Electronics Corporation
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