H - Electricity – 01 – L
Patent
H - Electricity
01
L
117/81, 148/2.4
H01L 21/205 (2006.01) C09K 11/64 (2006.01) C30B 25/02 (2006.01) C30B 25/22 (2006.01) H01L 21/20 (2006.01) H01L 21/86 (2006.01) H01L 33/00 (2006.01)
Patent
CA 1122859
Abstract Electronic grade aluminum nitride semiconductor material may be uniformly nucleated and epitaxially formed on an aluminum substrate by reacting aluminum oxide or aluminum nitride with nitrogen in the presence of carbon.
324077
International Business Machines Corporation
Na
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