Electronic grade aluminum nitride materials

H - Electricity – 01 – L

Patent

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117/81, 148/2.4

H01L 21/205 (2006.01) C09K 11/64 (2006.01) C30B 25/02 (2006.01) C30B 25/22 (2006.01) H01L 21/20 (2006.01) H01L 21/86 (2006.01) H01L 33/00 (2006.01)

Patent

CA 1122859

Abstract Electronic grade aluminum nitride semiconductor material may be uniformly nucleated and epitaxially formed on an aluminum substrate by reacting aluminum oxide or aluminum nitride with nitrogen in the presence of carbon.

324077

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