Electronic microvalve apparatus and fabrication

Details Electronic microvalve apparatus and fabrication Electronic microvalve apparatus and fabrication

F - Mech Eng,Light,Heat,Weapons

16

K

251/14

F16K 31/04 (2006.01) F15C 5/00 (2006.01)

Patent

CA 2025405

An electronic microvalve design and fabrication process for a miniature gas valve. In this microvalve design an objective is to minimize the operating voltage of the valve and minimize the force necessary to close the valve and hold it tightly closed against high gas pressures. The microvalve is an integral structure made on one piece of silicon and is a flow through valve with inlet and outlet on opposite sides of the silicon wafer.

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