Electronically controlled cryopump

Details Electronically controlled cryopump Electronically controlled cryopump

B - Operations, Transporting

01

D

62/3, 347/34

B01D 8/00 (2006.01) F04B 37/08 (2006.01) F04D 19/04 (2006.01) F04D 27/00 (2006.01)

Patent

CA 1322105

ELECTRONICALLY CONTROLLED CRYOPUMP Abstract of the Disclosure A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.

611136

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