Electrooptic device structure and method for reducing...

G - Physics – 02 – F

Patent

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G02F 1/225 (2006.01) G02F 1/035 (2006.01) G02F 1/21 (2006.01)

Patent

CA 2118272

An interferometric modulator comprising a substrate of titanium-doped lithium niobate (Ti:LiNbO3) having top and bottom surfaces and a waveguide formed in thetop surface is disclosed. A conductive layer is formed on the bottom surface of the substrate and electrically coupled to a top-surface ground plane or simply to ground potential. The bottom surface conductive layer functions to thermally stabilize the modulator during operation.

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