Electrostatic actuator

Details Electrostatic actuator Electrostatic actuator

H - Electricity

02

N

310/3

H02N 1/08 (2006.01) H02N 1/00 (2006.01)

Patent

CA 2022374

Abstract An electrostatic two-dimensional actuator includes a movable element and a stationary element facing each other across at least one pair of surfaces. An array of rectangular first parallel electrode and an array of rectangular second parallel electrodes are disposed on respective elements in such a manner as to intersect substantially orthogonally.

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