Electrostatic and magnetic compensation for beam shape...

Details Electrostatic and magnetic compensation for beam shape... Electrostatic and magnetic compensation for beam shape...

H - Electricity

01

J

313/35.13, 313/3

H01J 29/70 (2006.01) H01J 29/51 (2006.01) H01J 29/56 (2006.01)

Patent

CA 996624

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