H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/68 (2006.01) H02N 13/00 (2006.01)
Patent
CA 2514616
The invention concerns an electrostatic chuck (250) comprising an upper ceramic (205) bearing the substrate (200) to be treated and a lower ceramic (215) bearing heating elements (225) and radio frequency electrodes (220), said ceramics being permanently bonded together. Said ceramics are preferably bonded together by heated glass and the lower ceramic is fixedly assembled to a pedestal, for example through a soldered bonding.
La semelle électrostatique (250) selon l~invention comporte une céramique supérieure (205) qui porte le substrat (200) à traiter et une céramique inférieure (215) qui porte des éléments chauffants (225) et des électrodes radiofréquence (220), ces céramiques étant collées entre elles de manière durable. Préférentiellement, ces céramiques sont collées entre elles par du verre chauffé et la céramique inférieure est assemblée à un piédestal de manière durable, par exemple par une liaison brasée.
Robic
Semco Engineering S.a.
LandOfFree
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