Electrostatic chuck member and a method of producing the same

Details Electrostatic chuck member and a method of producing the same Electrostatic chuck member and a method of producing the same

C - Chemistry, Metallurgy

23

C

C23C 14/50 (2006.01) B23Q 3/15 (2006.01) C23C 4/00 (2006.01) H01L 21/683 (2006.01)

Patent

CA 2183709

An electrostatic chuck member comprises a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al2O3TiO2 based spray-coated layer containing a TinO2n-1 (n=1-9) type compound, and has a large volume resistivity and a less scattering thereof and a stable quality.

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