Electrostatic comb drive actuator, and optical controller...

Details Electrostatic comb drive actuator, and optical controller... Electrostatic comb drive actuator, and optical controller...

G - Physics

02

B

G02B 26/00 (2006.01) B81B 3/00 (2006.01) B81B 7/02 (2006.01)

Patent

CA 2474099

An electrostatic comb drive actuator, characterized in that plural outer suspended elastic beams 2a and 2b are disposed in parallel to and outside plural inner suspended elastic beams 1a and 1b disposed in parallel to each other; the ends of the inner suspended elastic beams and the outer suspended elastic beams on both sides are connected with end connecting beams 3a and 3b; the outer suspended elastic beams are supported at their centers on a board 5; the inner suspended elastic beams are connected with each other at their centers by means of a working section 6; a movable comb electrode 7 is supported on the working section; and a fixed comb electrode 8 is supported on the board.

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