Electrostatic discharge control during jet spray

Details Electrostatic discharge control during jet spray Electrostatic discharge control during jet spray

B - Operations, Transporting

08

B

B08B 3/02 (2006.01) B08B 6/00 (2006.01) B08B 7/00 (2006.01) B08B 7/02 (2006.01) B24C 1/00 (2006.01) B24C 3/32 (2006.01) H01L 21/00 (2006.01) H05F 3/04 (2006.01)

Patent

CA 2105743

An improved apparatus and method adapted for use in removing trace contaminants from the surface of a chosen substrate, such as delicate surfaces or precision parts, by application of a stream or jet spray of expended fluid to the substrate, surface. The improvement consists of controlling electrostatic charges generated on or near the substrate surface during the cleaning process.

Appareil et méthode améliorés pour enlever des contaminants à l'état de trace de la surface d'un substrat donné, notamment sur des surfaces délicates ou des pièces de précision en appliquant un jet de fluide ou en pulvérisant un fluide sur la surface du substrat. L'amélioration consiste à réguler la charge électrostatique produite sur ou à proximité du substrat au cours du processus de nettoyage.

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