Electrostatic levitation furnace

Details Electrostatic levitation furnace Electrostatic levitation furnace

F - Mech Eng,Light,Heat,Weapons

27

B

F27B 17/00 (2006.01) H05B 6/32 (2006.01)

Patent

CA 2462125

An electrostatic levitation furnace is improved by providing three pairs of electrodes opposed to each other respectively on three axes perpendicularly intercepting each other at a position where the sample is to be levitated in the vacuum chamber, and disposing a plurality of access ports, which are directed to the position of the sample, to the vacuum chamber tree-dimensionally, whereby the accessible direction against the sample is diversified, it becomes possible to improve the degree of freedom in distribution of various apparatuses and easily cope with increase of apparatuses.

L'invention concerne un four à lévitation électrostatique, dans lequel trois ensembles d'électrodes mutuellement opposées sur trois axes mutuellement perpendiculaires sont installées dans une chambre à vide, autour de la position de lévitation d'un échantillon, un port d'accès orienté vers la position de lévitation de l'échantillon étant façonné de manière tridimensionnelle dans la chambre à vide. Le degré de liberté d'agencement de différents types d'équipements est accru par l'augmentation du nombre de sens d'accès à l'échantillon, des équipements supplémentaires pouvant aisément être ajoutés.

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