Electrostatic-magnetic lens for particle beam apparatus

Details Electrostatic-magnetic lens for particle beam apparatus Electrostatic-magnetic lens for particle beam apparatus

H - Electricity

01

J

358/10.1

H01J 37/10 (2006.01)

Patent

CA 1264873

20365-2679 ABSTRACT OF THE DISCLOSURE An electrostatic-magnetic lens is provided having either a symmetrical or asymmetrical magnetic lens which is overlaid with an electrostatic immersion lens. One electrode of the immersion lens is formed as a hollow cylinder, which is within an upper pole piece of the magnetic lens concentrically relative to the axis of symmetry thereof and extending into the region of the pole piece gap. The lower pole piece of the magnetic lens is preferably at a ground potential and clad with the beam guiding tube for protection against contamination and forming the lower electrode of the electrostatic immersion lens.

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