Electrostatic mechanically actuated fluid micro metering device

Details Electrostatic mechanically actuated fluid micro metering device Electrostatic mechanically actuated fluid micro metering device

G - Physics

01

F

G01F 11/08 (2006.01) B67D 99/00 (2010.01) B05B 5/00 (2006.01) B41J 2/14 (2006.01) B41J 2/175 (2006.01) B81B 3/00 (2006.01)

Patent

CA 2353252

An electrostatic mechanically actuated micro-metering device having an array of fluid chambers with orifices for ejecting fluid is designed, such that the pitch of the chamber array is independent from length and height dimensions of the actuating membrane that comprises a chamber wall, resulting in a higher resolution without requiring a substantially exponential increase in the applied voltage.

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