Electrostatic microactuator with offset and/or inclined comb...

H - Electricity – 02 – N

Patent

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Details

H02N 1/00 (2006.01) G02B 6/35 (2006.01)

Patent

CA 2370044

An electrostatic microactuator (23) comprising a substrate (27) having a first comb drive member (61) mounted on the substrate and a second comb drive member (62) overlying the substrate. At least one spring member (83) having a first end portion (83a) secured to the substrate and a second end portion (83b) secured to the second comb drive member. The second comb drive has a plurality of second comb drive fingers (72) extending from a side of a second elongated member (71) and is movable between a first position in which each second comb drive finger is not substantially interdigitated with an adjacent pair of a plurality of first comb drive fingers extending from a side of a first elongated member of the first comb drive member, and a second position in which each of such second comb drive finger is substantially fully interdigitated with such adjacent pair of first comb drive fingers.

Cette invention concerne un micro-actionneur électrostatique (23) composé d'un substrat (27) sur lequel est monté un premier ensemble peigne de commande (61), lequel substrat est surmonté par un second peigne de commande (62). On trouve au moins un élément à ressort (83) avec une première partie d'extrémité (83a) fixée au substrat et une seconde partie d'extrémité (83b) fixée au second peigne de commande. Le second peigne de commande une pluralité de secondes dents espacées (72) partant de l'un des côtés d'un second élément allongé (71). Ce second élément allongé peut se déplacer entre une première position, dans laquelle ses diverses dents ne s'encastrent pas complètement dans des paires adjacentes de dents du premier élément allongé, et une seconde position dans laquelle chacune de ses dents vient s'encastrer pratiquement complètement dans une paire de dents du premier élément allongé.

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