Electrostatic particle exposure system and method of...

H - Electricity – 01 – J

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H01J 37/147 (2006.01) H01J 37/04 (2006.01) G01N 33/50 (2006.01)

Patent

CA 2660353

A system for exposing a target material to small particles. The system includes an exposure chamber that receives the target material. A stream of charged particles is directed via an inlet into the exposure chamber toward the target material. One or more electrodes are located relative to the target material and the inlet, and are electrically charged, so as to cause at least some of the charged particles to impact upon the target material. The system can be used to expose the target material to small, for example, nanoscale, particles in a gas environment.

La présente invention concerne un système servant à exposer un matériau cible à de petites particules. Le système comprend une chambre d'exposition qui reçoit le matériau cible. Un courant de particules chargées est dirigé via une admission dans la chambre d'exposition vers le matériau cible. Une électrode ou plus sont disposées par rapport au matériau cible et l'admission, et sont chargées électriquement de façon à ce qu'au moins certaines des particules chargées frappent le matériau cible. Le système peut être utilisé pour exposer le matériau cible à de petites particules, de taille nanoscopique par exemple, dans un environnement gazeux.

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